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MOTOROLA SEMICONDUCTOR TECHNICAL DATA Order this document by MPXM2102/D 100 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors The MPXM2102 device is a silicon piezoresistive pressure sensors providing a highly accurate and linear voltage output directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a resistor network integrated The chip is laser trimmed for precise span and offset calibration and temperature compensation. • Temperature Compensated Over 0°C to +85°C • Unique Silicon Shear Stress Strain Gauge • Easy to Use Tape & Reel • Ratiometric to Supply Voltage • Gauge Ported & Non Ported Options Application Examples • Pump/Motor Controllers • Robotics • Level Indicators • Medical Diagnostics • Pressure Switching • Barometers • Altimeters Figure 1 shows a block diagram of the internal circuitry on the pressure sensor chip. X-ducer SENSING ELEMENT THIN FILM TEMPERATURE COMPENSATION AND CALIBRATION CIRCUITRY 2 Vout+ 4 Vout- Figure Temperature Compensated Pressure Sensor Schematic VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side P1 relative to the vacuum side P2 . Similarly, output voltage increases as increasing vacuum is applied to the vacuum side P2 relative to the pressure side P1 . Preferred devices are Motorola recommended choices for future use and best overall value. is a trademark of Motorola, Inc. MPXM2102 SERIES Motorola Preferred Device 0 to 100 kPa 0 to psi 40 mV FULL SCALE SPAN TYPICAL SCALE 2:1 CASE MPAK, STYLE 1 SCALE 2:1 CASE MPAK, STYLE 2 PIN NUMBER 1 Gnd +Vout MPXM2102 SERIES MAXIMUM RATINGS Rating Overpressure 8 P1 > P2 Storage Temperature Operating Temperature Symbol Pmax Tstg TA Value 200 to +125 to +125 Unit kPa °C °C OPERATING CHARACTERISTICS VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2 Characteristic Pressure Range 1 Supply Voltage 2 Supply Current Full Scale Span 3 VFSS Offset 4 MPXM2102D/G Series MPXM2102A Series Voff Sensitivity Linearity 5 ORDERING INFORMATION Device Type MPXM2102D Options MPXM2102DT1 Tape and Reel MPXM2102GS Ported MPXM2102GST1 Ported, Tape and Reel MPXM2102A MPXM2102AT1 Tape and Reel MPXM2102AS Ported MPXM2102AST1 Ported, Tape and Reel Motorola Sensor Device Data MPXM2102 SERIES PACKAGE DIMENSIONS M T B S A S VENT BACKSIDE VENT SEATING PLANE CASE MPAK, STYLE 1 NOTES DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, CONTROLLING DIMENSION INCH. INCHES MILLIMETERS DIM MIN MAX MIN MAX M 0_ 7 _ 0_ 7 _ STYLE 1 PIN GND +VOUT VS -VOUT M T B S A S D G W P S SEATING PLANE CASE MPAK, STYLE 2 NOTES DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, CONTROLLING DIMENSION INCH. INCHES MILLIMETERS DIM MIN MAX MIN MAX M 0_ 7 _ 0_ 7 _ STYLE 1 PIN GND +VOUT VS -VOUT Motorola Sensor Device Data |
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