KXUD9-1026

KXUD9-1026 Datasheet

KXUD9-1026 Rev. 3

Part	Datasheet
KXUD9-1026	KXUD9-1026 (pdf)

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± 2g Tri-axis Digital Accelerometer Specifications PART NUMBER: Sep-2010 Product Description The KXUD9 is a tri-axis silicon micromachined accelerometer with a user selectable full-scale output range of ±2g, ±4g, ±6g or ±8g. The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from accelerationinduced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning, self-test, and temperature compensation. The accelerometer is delivered in a 3 x 3 x mm LGA plastic package operating from a 3.6V DC supply. Either I2C or SPI interfaces can be used to communicate to the chip to trigger A/D conversions or manage power consumption. Functional Diagram X Sensor Y Sensor Charge Amp Z Sensor Vdd 5 IO Vdd 1 GND 4 36 Thornwood Dr. Ithaca, NY 14850 tel 607-257-1080 fax:607-257-1146 - Temp Sensor A/D SPI/I 2C 3 AUX IN 2010 Kionix All Rights Reserved 327-1698-1008241828 Page 1 of 23 ± 2g Tri-axis Digital Accelerometer Specifications PART NUMBER: Sep-2010 Product Specifications Table Mechanical specifications are for operation at 2.6V and T = 25C unless stated otherwise Parameters Units Typical Operating Temperature Range Zero-g Offset counts 1905 2048 2191 Zero-g Offset Variation from RT over Temp. mg/ºC FS1=1, FS0=1 ± 2g Sensitivity1 FS1=1, FS0=0 ± 4g counts/g FS1=0, FS0=1 ± 6g FS1=0, FS0=0 ± 8g Sensitivity Variation from RT over Temp.

PDF Datasheet Preview

± 2g Tri-axis Digital Accelerometer Specifications

PART NUMBER:

Sep-2010

Product Description

The KXUD9 is a tri-axis silicon micromachined accelerometer with a user selectable full-scale output range of ±2g, ±4g, ±6g or ±8g. The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from accelerationinduced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning, self-test, and temperature compensation. The accelerometer is delivered in a 3 x 3 x mm LGA plastic package operating from a 3.6V DC supply. Either I2C or SPI interfaces can be used to communicate to the chip to trigger A/D conversions or manage power consumption.

Functional Diagram

X Sensor

Y Sensor

Charge Amp

Z Sensor

Vdd 5

IO Vdd 1 GND 4
36 Thornwood Dr. Ithaca, NY 14850 tel 607-257-1080 fax:607-257-1146 -

Temp Sensor

A/D SPI/I 2C
3 AUX IN
2010 Kionix All Rights Reserved 327-1698-1008241828 Page 1 of 23
± 2g Tri-axis Digital Accelerometer Specifications

PART NUMBER:

Sep-2010

Product Specifications

Table Mechanical
specifications are for operation at 2.6V and T = 25C unless stated otherwise

Parameters

Units

Typical

Operating Temperature Range

Zero-g Offset
counts
1905
2048
2191

Zero-g Offset Variation from RT over Temp.
mg/ºC

FS1=1, FS0=1 ± 2g

Sensitivity1

FS1=1, FS0=0 ± 4g
counts/g

FS1=0, FS0=1 ± 6g

FS1=0, FS0=0 ± 8g

Sensitivity Variation from RT over Temp.

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Datasheet ID: KXUD9-1026 644874